NanoSpace offers a number of MEMS-based components for the space industry, e.g. filters, proportional valves for fluid control, flow restrictors, isolation valves and pressure relief valves.

All our products can be adopted to customer specific requirements. Read more about the different products and contact us if further information is needed, or if you have specific requirements which appears to be beyond what is given here.


MEMS Isolation Valve

The NanoSpace MEMS Isolation Valve (MIV) is a simple, reliable, robust and high pressure compatible isolation valve. The entire functional unit is manufactured using MEMS technology and has a weight less than one gram. The design is redundant with two inlets and nine outlets. Moreover, a filter function is integrated in the chip.

The complete component including housing and electrical interface has a weight of 80 grams. The MIV has been proven functional in the pressure range from 5 bars to 200 bars and has been proof tested up to 500 bars.

For more information see data sheets MEMS Isolation Valve and Xenon Tank MEMS Isolation Valve.


Pressure Relief Valve

NanoSpace's MEMS Pressure Relief Valve (MPRV) is designed to safely relief pressure in a system in case of an unexpected pressure increase. As an example, this functionality is commonly required in pressurised systems onboard satellites.

The MPRV can be opened either actively by an electrical signal, or passively, by a burst membrane. Moreover, the MPRV has a check valve functionality which closes again when the pressure returns to the nominal value. The MPRV is redundant with two active and two passive inlets and does also contain a filter.

For further information see our data sheet MEMS Pressure Relief Valve.



NanoSpace has developed a methodolgy to design and manufacture MEMS filters with a wide range of specifications. As an example the cold gas micropropulsion system onboard the PRISMA satellite contain several filters of this type.

See our data sheets MEMS Filter and High Capacity MEMS Filter for more information.


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